INVESTIGATION OF VELOCITY SURFACE OF BULK ACOUSTIC WAVES FOR PROTON-EXCHANGED LiNbO3 CRYSTAL G. Chen, X. R. Zhang, J. C. Cheng State Key Lab. of Modern Acoustics and Institute of Acoustics, Nanjing University Nanjing 210093, China ABSTRACT. We calculate the velocity surface of bulk acoustic waves propagating in the YZ-, XY- and ZX- planes of proton-exchanged LiNbO3, based on the theory of acoustic wave in anisotropic solid with piezoelectricity. The calculation results show that the velocity change due to proton-exchange when the wave propagating along X-axis is larger than that along Z- axis for Y-cut substrate, in spite of longitudinal or transverse wave. The curve of velocity surface for PE Z-cut substrate is near to a circle, while that for pure Z-cut LiNbO3 is a hexagonal. The velocity surface for PE X-cut LiNbO3 seems to be turned an angle from that for pure X-cut LiNbO3. The detail results, discussions and comparison with the experiment will present in this paper. INTRODUCTION It is well know that LiNbO3 crystal undergoes ion exchange in acide media, replacing some or all of the lithium ions with protons is called proton exchange (PE) [1]. When this reaction is carried out in strong acide (for example, aqueous nitric acid), complete exchange results, accompanied by a structural transformation from the rhombohedral LiNbO3 structure to the cubic perovskite structure [2]. With weaker acids, partically exchanged materials can be prepared with retain the LiNbO3 structure. Those materials are of particular interest because they can be prepared as thin layers at the surface of LiNbO3 crystal without affecting their optical quality, and cause large optical and acoustic refraction index increases which have been used in a number of optical devices and surface acoustic waveguides [3-4]. Rice studied the properties of Li: xkxNbO3 as a function of x, temperature, and stoiciometry of the LiNbO3 used for its preparation [5]. The acoustic properties of PE LiNbO3 used in surface acoustic waveguides were measured by using the Brillouin Scattering method [6], acoustic microscopy method [7] and the interdigital transducers (here after IDT) method [8-13]. Hinkov fabricated the first time SAW waveguides on Y-cut LiNbO3 substractes by PE and studied the influence of the source dilution, the annealing, or the Ti pre-diffusion on the SAW velocity, by using IDT as SAW excitation source and optic probe as detector [4]. They reported that: The exchange in pure acid always leads to a velocity decrease. It is larger for Y-X sample and smaller for X-Z sample. The velocity change initially decreases with the annealing time and then remains essentially unchanged. The absolute value of the velocity change decreases with the dilution of the proton source. In contrast to the exchange in pure acid, CP657, Review of Quantitative Nondestructive Evaluation Vol. 22, ed. by D. O. Thompson and D. E. Chimenti © 2003 American Institute of Physics 0-7354-0117-9/03/S20.00 1277 the SAW velocity increases for Y-Z samples exchanged in a diluted source. We are interesting in Hinkov et al [6] experimental results because they also measured velocity of longitudinal (L-) wave propagating along the proton exchanged (PE) layer. The velocity of SAW and L-wave propagating along PE LiNbO3 surface are measured by using Brillouin scattering techniques at microwave frequencies (~ 1010 Hz) for the observation of soundwaves whose acoustic wavelengths are considerably smaller than the exchange depths of the samples, the wavelength of longitudinal wave >-LA=0.11 |um, of SAW >-SAW=0.251 and 0.276 |um, but the depths of PE are near to 4 |um. We can regard that all of the velocity decrease measured are contributed by the PE part of the sample. It is convenient to deduce the bulk wave property of the PE sample. However, they only report that the reduction of the effective elastic constants amounting to about 40% for the PE LiNbO3, but they did not make theoretical calculation for comparison. And nobody study on the property of bulk wave in PE LiNbO3. It is consideration on investigation the velocity surface of bulk wave in surface of xy-, yz- and xz- planes for the PE LiNbO3, to observed the change of the structure due to PE treatment. Recently, we calculate the velocity surface of bulk acoustic waves propagating in the YZ-, XY- and ZX- planes of proton-exchanged LiNbO3, based on the theory of acoustic wave in anisotropic solid with piezoelectricity [15], and by using the elastic constants evaluated by Biebl [16]. The calculation results, discussion are present in this paper. BRIEF DESCRIPTION OF PREVIOUS RESULTS The variation of the SAW velocity in the x-z plane of a LiNbO3 crystal with the angle a, measured by Hinkov et al., is shown in Figure 1. Figure 2 shows the value of the velocity of L-wave versus the depth of PE for a y-x LiNbO3. The depth is obtained by measurement of the extraordinary refractive index as a function of penetration depth by light of wavelength 514.5 nm being guided along the x-axis in proton exchanged region of a y-cut LiNbO3. From Figure 1, we know that the velocity change of SAW is anisotropic. The velocity change of SAW propagating along x-direction (17%) is larger than that along z-direction. The effective anisotropy of the exchange is so larger as to even reverse the sign of the acoustic birefringence of the crystal. The velocity change is caused by the decreases of the elastic moduli. From Figure 2, We can get the velocity of the L-wave is related with the depth of the PE layer. However there was no calculation about the velocity surface of bulk wave propagating in the PE LiNbO3. Since the wavelength of SAW and L-wave are much small than the PE depth, the PE layer is anisotropic. THEORETICAL CALCULATIONS We calculate the velocity surface of bulk acoustic waves propagating in the YZ-, XYand ZX- planes of proton-exchanged LiNbO3, based on the theory of acoustic wave in anisotropic solid with piezoelectricity for pure LiNBO3 and piezoelectric effect ignired[15].The elastic constants are taken from the constants evaluated by Biebl (c.f. Table 1). 1278 3700 3600- I^ 3500- CO •s 3200- 1 3000- ""o > * for pure YX LiNbO3 *.SAW =0.25 1 (in 5500-, for YX PE:LiNbO3, ^=0.11 urn for YX H+LiNb03, X,SAW=0.25 1 jam o 5400A A A A A 5300- 3400A 3300- 52000 31002900- 0 5100- o o o 00° x 4900- z 2800- . . . . . . . J ... 9700- 0 20 40 60 80 4800 0 100 1 2 Depth d Angle a (deg.) FIGURE 1 The variation of the SAW velocity measured in the x-z plane of a LiNbO3 crystal with the angle a. (\AW=0.251|um), f=14.4 GHz, Relative VS change along X-direction is about -70 %., and is larger than Z-axis about 6%. 3 4 5 (jam) FIGURE 2 the value of the velocity of L- wave versus the depth of PE for a Y_X LiNbO3 Relative change -25 %.(6570-»4950 m/s when dPE=1.5 |um, f=59,73 GHz), the maximam change is observed at dPE=1.5|um. The Christoffel equation for anisotropic crystals appears in the form (1) where is called a piezoelectrically stiffened elastic constant. The r? called the piezoelectrically Christoffel matrix. Its elements are functions only of the plane propagation direction and the stiffness constants of the medium. TABLE 1 The elastic constants q. (109N m2) for LiNbO3 and HxLi1.xNbO3. Material Cu C12 C13 LiNb03 203 53 HxLi1.xNbO3 150 39 C14 C33 75 9 75 0 1279 C* C66 245 60 75 210 72 55 lx 0 0 0 ly 0 L 0 0 0 L 1, 0 0 lz 0 ly 0 lz o ix , and ikLj = -iklLj —» ik 0 lz l y 0 0 1 1 1 0 iz o i x L, L 0 where lx=kx/k, ly=ky/k, lz=kz/k are the direction cosines of the propagation direction. The elastic contants matrix for LiNbO3crystal (trigonal crystal classes 3m) is C12 "Cn C13 c12 Cn c13 c13 c13 c33 I ° 0 0 0 0 0 0 C 14 -Ci4 0 044 0 0 0 0 0 0 0" 0 0 0 044 CM CM C c 6 6 =-(c n (2) 66_ The values of the elastic constants for LiNbO3 and PE LiNbO3 are taken from the Table 1 respectively. The Piezoelectric properties [er] of LiNbO3 crystal is 0 -e y2 0 0 0 e x5 -e y2 " 0 0 0 0 3.7 -2.5" 0 = -2.5 2.5 0 3.7 0 0 0 e x5 0 0.2 0.2 0 0 1.3 0 0 0 ^z3 0 (3) where ex6= -ey2. And we assume that the piezoelectric coefficients decrease neare to zero. We calculate the variation of velocity of longitudinal (L-) and transverse (T-) waves with azimuthal angle a (propagation direction) for y-cut (i.e., within xz-plane), x-cut (yz-plane, and z-cut (xy-plane) of virgin and proton-exchanged (PE) crystal respectively. The calculated results are shown in Figure 3 to Figure 9. RESULTS AND DISCUSSIONS Figure 3 shows the velocity of the transverse wave versus the angle a for y-cut LiNbO3, and PE LiNbO3 respectively. From Figure 3, it can be seen that: The velocity of T-wave decrease in x direction is 21%, but increase in z direction is 11%. For the PE LiNbO3, The velocity in z direction is larger than that in x direction about 200 m/s. The tend of the T-waves curves in Figure 3 near to that of SAW drawn in Figure 1, but the values of T-wave are higher than that of the SAW, particularly for the velocity of T-wave propagating along the z-direction.. Figure 4. shows the velocity surface of the L-wave for y-cut LiNbO3, including piezoelectricity for pure LiNbO3, where the solid line is for unchanged LiNbO3 and the dash line is for PE LiNbO3. From Figure 4, we can seen that 1280 the relative decrease of the L-wave in x- direction is larger than that in z-direction. It is the decrease of L-wave in in xx- direction direction is is larger larger than than that that in in z-direction. z-direction. ItIt isis the relative relative of the the as L-wave also the samedecrease as the results SAW. The velocity surface of the transverse for xz-plane is also the same as the results as SAW. The velocity surface of the transverse for xz-plane xz-planeisis also the same as the results as SAW. The velocity surface of the transverse for shown in Figure 5. It can be seen again that: the velocity change for the transverse waves shown 5. It again that: the the velocity change change for for the the transverse transverse waves waves shown in in Figure Figure It can can be be seen seen again that: propagating along5.x-direction is larger than thatvelocity along z-direction. Figure 6 shows the propagating along x-direction is larger than that along z-direction. Figure 6 shows the propagating along x-directionwaves is larger than LiNbO that along z-direction. Figure 6 shows the . We find that: the velocity surface is velocity surface of transverse for z-cut 3 We find find that: that: the the velocity velocity surface surfaceisis velocity surface of transverse waves for z-cut LiNbO LiNbO33.. We velocity surface of transverse waves for z-cut changed from hexagon for unchanged LiNbO3 to circle for PE LiNbO3. Figure 7 shows the to circle for for PE PE LiNbO LiNbO33..Figure Figure77shows showsthe the changed from for LiNbO33 to changedsurface from hexagon hexagon for unchanged unchanged can be seen that: the velocity surface is velocity of L- waves for z-cut LiNbO LiNbO3. Itcircle . It can be be seen seen that: that: the the velocity velocity surface surface isis velocity of waves for z-cut velocity surface surface of LL-change waves of forL-wave z-cut LiNbO LiNbO 33. It can along changed, the relative propagating y-direction is larger than that changed, the relative change of L-wave L-wave propagating propagating along along y-direction y-direction isis larger larger than than that changed, the relative change of along x-direction, but not change can be seen, when the wave propagating alongthat the along x-direction, but not change can be seen, when the wave propagating along the along x-direction, but not change can be seen, when the wave propagating along the direction with a deviating angle from x-axis 15° -45°, 135° -165°, 195° -225°, 315° -345°. direction with deviating angle from from x-axis 15° -45°, 135° -165°, 195° 195° -225°, -225°, 315° 315° -345°. -345°. direction with aathe deviating 15° -45°, 135°LiNbO -165°, Figure 8 shows velocityangle surface ofx-axis T- waves for x-cut 3. It can be seen that: the can be be seen seen that: that: the the Figure of TT- waves for x-cut x-cut LiNbO LiNbO3.. ItIt can Figure 88 shows shows the the velocity velocity surface surface of waves for direction of maximum velocity seems turn an angle of 60°, along3 inverse clock direction, direction turn an an angle angle of of 60°, 60°, along along inverse inverse clock clock direction, direction, direction of of maximum maximum velocity velocity seems seems turn from the angle 30 ° for unchanged LiNbO3 to 90° for PE LiNbO3. to 90° 90° for for PE PE LiNbO LiNbO33.. from LiNbO33 to from the the angle angle 30 30 °° for for unchanged unchanged LiNbO 7000 7000 7000 6000 6000 6000 5000 5000 5000150 4000 150 4000 4000 3000 3000 3000 2000 2000: 2000 1000 1000 1000 0 180 0 180 180 Iji 4 10000 : 1000 1000 2000 2000 2000 3000 3000 3000 4000 210 40004000 210 5000 5000 6000 6000 7000 70007000 Velocity T-wave (m/s) Velocity ofof T-wave (m/s) Velocity of T-wave (m/s) For Y-cut LiNbO 3 4800 For For Y-cut Y-cut LiNbO LiNbC)3 4800 '*•• Qusi-T for pure crystal Qusi-T for purecrystal crystal * • •9 • Qusi-T Qusi-Tfor for PE: pure crystal 4400 4400 PE: crystal % A Qusi-T Qusi-T for for PE: crystal %% 4000 4000 3600 3600 3200 3200 0 0o X X X X> ^V 4 ^ 20 20 20 40 40 ' 60 go 60 *"" 80 so Z 80 Z Z Angle (degree) Angle (degree) (degree) Angle 90X 90X 120 120 L-W pure LiNbO3 L-W pure LiNbO3 3 L-WpureLiNb0 L-W PE LiNbO3 L-W PE LiNbO3 L-WPELiNbO, 60 60 30 30 0 Z O0 ZZ 330 330 240 300 240 240 300 300 270 270 270 FIGURE FIGURE33 The transverse wave wave FIGURE The velocity velocity of of the the transverse versus the angle α. for y-cut LiNbO 3,, including versus the angle a. for y-cut LiNbO versus the angle α. including 33 including piezoelectricity piezoelectricity for piezoelectricity for pure pure and and PE PE LiNbO LiNbO33 respectively. respectively. respectively. 90 XX 90 4000 40004000 3000 30003000 2000 20002000 120 120 60 60 30003000 3000 40004000 4000 3 of pure LiNbO x T2 T2ofpureLiNb0 T2 of pure LiNbO333 of Pure LiNbO o T1 TlofPureLiNb0 T1 of Pure LiNbO33 LiNbO33 * T2 T2of ofPE: PE: T2 of PE: LiNb0 LiNbO3 T1 of PE: LiNbO33 ---TlofPE:LiNb0 T1 of PE: LiNbO 000 1000 10001000 20002000 2000 ZZ 330 330 240 240 30003000 3000 40004000 4000 300 300 270 270 270 3 60 60 30 30 150 150 180 180 0 0 X X 330 330 210 210 240 240 300 300 270 270 forY-cut Y-cutLiNbO LiNbC) for for Y-cut LiNbO33 Qusi-T-w pureLiNbO LiNbO ——— Qusi-T-w Qusi-T-wpure pure LiNbO3 33 Qusi-T-w PE LiNbO . Qusi-T-w Qusi-T-wPELiNbO PE LiNbO3 3 120 120 4000 40004000 3000 30003000 2000 20002000 1000 10001000 0 0 210 210 3 Y 90 Y Yg90 o 3 1000 10001000 000-180 180 1000 10001000 20002000 2000 FIGURE The velocity surfaceof ofthe theL-wave. L-wave.For For FIGURE FIGURE 444 The The velocity velocity surface surface of the L-wave. For , including piezoelectricity for pure y-cut LiNbO 3 y-cut LiNbO , including piezoelectricity for pure y-cut LiNbO33, including piezoelectricity for pure LiNbO where the solid line line isis is for for unchanged unchanged LiNbO LiNbO333... where where the the solid solid line for unchanged and the dash line is for PE LiNbO . LiNbO 3 3 LiNbO andthe thedash dashline lineisisfor forPE PELiNbO LiNbO LiNbO3 and 3. . 30 30 30 150 150 for Y-cut LiNbO3 for forY-cut Y-cutLiNbC) LiNbO3 For ForZ-cut Z-cutLiNbO, LiNbO3 For Z-cut LiNbO 3 FIGURE555The Thevelocity velocity surface surface of of transverse FIGURE FIGURE The velocity surface of transverse transverse waves waves fory-cut y-cutLiNbO LiNbO33,,, including including piezoelectricity for for pure for y-cut LiNbO piezoelectricity for for pure pure 3 including piezoelectricity LiNbO3.3.. LiNbO LiNbO 3 FIGURE FIGURE 66 The The velocity velocity surface transverse surface of of transverse transverse waves including waves for for z-cut z-cut LiNbO including LiNbO3,33, including piezoelectricity piezoelectricity for forpure pureLiNbO LiNbO3.3. 1281 3 m/s 90 L-w pure LiNbO3 Y Z L-w PE LiNbO3 4000 120 60 3500 6000 3000 5000 L-w pure LiNbO L-w pure LiNbO 33 2500 150 4000 30 150 Y 90 L-w L-wPE PELiNbCX LiNbO3 2000 3000 m/s 1500 4 0 0 0 H 4000 120 60 200060001000 3500 3500: 6000 10005000500 3000 3000 5000 0 : 180 150 180 0 X 2500 04000 2500 4000: 30 150 500 2000 2000 100030003000 1500 1000 1500 200020002000 1000 1500 1000: 30001000 1000500 500: 2000 330 210 4000 00: 180210 0 X 25000 0 180 500 500 3000 50001000 1000 1000 3500 600020002000 1500240 300 1500: 4000 30003000 2000 2000: 270 210 For Z-cut LiNbO3 330 210 40004000 2500 2500 300050003000: 5000 3500 60006000 7 The velocity surface of L- waves for 3500 FIGURE FIGURE 240 300 4000 4000 T-wave for pure crystal T-wave for PE crystal 90 120 60 Z 90 120 T-wave T-wavefor forpure purecrystal crystal 30 T-wavef T-wave or forPE PEcrystal crystal 60 30 0 330 0 240 Y Y 300 270 330 for X-cut LiNbO 3 8240The velocity surface of T- waves for 300 270 270 ForZ-cutLiNbO z-cut LiNbO3 including piezoelectricity piezoelectricity for pure x-cut LiNbO3 including For Z-cut LiNbO for pure for forX-cut X-cutLiNbO, LiNbO LiNbO3. LiNbO3. FIGURE 7 The The velocity velocity surface surface of of LL- waves waves for for FIGURE FIGURE 88 The The velocity velocity surface surface of of TT- waves waves for for z-cut LiNbO33 including including piezoelectricity piezoelectricity for for pure pure x-cut including piezoelectricity piezoelectricity for for pure pure x-cut LiNbO LiNbO33 including The velocity surface of T- waves for x-cut LiNbO 3. is shown in Figure 9. We learn LiNbCX LiNbCL LiNbO LiNbO 3. 3. 3 3 that the velocity surface is changed near to a velocity surface of T-wave propagation in a cube face cubic crystal classes PE for LiNbO Theofvelocity surface of T- for waves x-cut 3. LiNbO shown in in Figure Figure 9.9. We We learn learn surface x-cut LiNbO33.. isis shown that Rice had reported when the PE exchange is carried thatWe theremember velocity surface is changed near aa velocity surface of propagation in surface changed near to tothat velocity surface of T-wave T-wavereaction propagation in aa face cubiccomplete crystal for LiNbO outcube in strong exchange results, accompanied by a structural transformation 33. . face ofacid, crystal classes classes for PE PE LiNbO We rhombohedral remember that LiNbO Rice had reported when the exchange reaction carried to the cubic perovskite [2]. With from the had reported that that when the PE PE exchangestructure reaction isis carried 3 structure out in strong acid, complete exchange results, accompanied by a structural transformation weaker acids, partially exchanged materials be prepared retain the LiNbO3 exchange results, can accompanied by a with structural transformation from the rhombohedral the perovskite structure [2].inWith weaker 3 structure to cubic the cubic perovskite structure With from the rhombohedral LiNbO structure. We think that inLiNbO the middle acidtocase, may have mixed structure the[2]. PE layer. 3 structure acids, materials be prepared with retain the LiNbO We3 3 structure. acids, exchanged partially materials can be prepared with retain the LiNbO Forweaker bulkpartially exchange, may exchanged cause the can structure change, then enable the velocity surface think that in the middle acid case, may have mixed structure in the PE layer. For bulk structure. We think that in the middle acid case, may have mixed structure in the PE layer. rotation. exchange, maydesign cause wave-guide the change, then thethen velocity surface For bulk exchange, maystructure cause the structure change, enable the rotation. velocity surface Thus we can by control theenable PE processing conditions. Thus we can design wave-guide by control the PE processing conditions. rotation. Thus we can design wave-guide by control the PE processing conditions. Qusi-T of pure crystal Z 4000 40003000 3000- 150 4000 2000 20003000 1000 150 10002000180 0 01000 1000 10000 180 2000 20001000 210 3000 30002000 4000 210 4000 3000 4000 120 120 Qusi-T of crystal Qusi-T of pure PE crystal 90 Qusi-T of PE crystal 60 ^^~~"~~T~~~>-^ Z 90 120 Qusi-T of pure crystal Qusi-T of PE crystal 60 30 30 0 Y 0 Y 330 240 240 "^<C___[_ 270 270 240 300 330 for LiNbO33 for X-cut X-cut LiNb0 300 FIGURE 9 The velocity including piezoelectricityforfor pure LiNbO FIGURE 9 The velocitysurface surfaceofofT-T-waves wavesfor for x-cut x-cut LiNbO LiNbOfor pure LiNbO X-cut LiNbO3piezoelectricity 33 including 3. 3. 270 FIGURE 9 The velocity surface of T- waves for x-cut LiNbO3 including piezoelectricity for pure LiNbO3. 1282 CONCLUSIONS As mentioned above, some conclusions can be given. We calculate the velocity surface of bulk acoustic waves, including the L- and T-waves, propagating in the YZ-, XY- and ZX- planes of proton-exchanged and unexchanged LiNbO3, based on the theory of acoustic wave in anisotropic solid with piezoelectricity. The calculation results show that the value of velocity change due to proton-exchange when waves propagating along X-axis is larger than that along Z- axis for Y-cut crystal, in spite of Longitudinal or Transverse wave. The curve of velocity surface for PE Z-cut substrate is near to a circle, while that for pure Z-cut LiNbO3 is a hexagonal. The velocity surface for PE X-cut LiNbO3 seems to be turned an angle from that for pure X-cut LiNbO3. And the value of L-wave calculated is the same as the measured by Hinkov et al., when using the elastic constants evaluated by Biebl and multiply 0.8. ACKNOWLEDGMENTS This work is supported by The State Key Lab. of Modern Acoustics, Nanjing University, and Nanjing, China. REFERENCES 1. C. E. 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Yan, Investigation of the influence of surface perturbation on the SAW velocity of LiNbO3 wafers. Thesis of Nanjing University (1984). 14. M. de Micheli, J. Botineau, P. Sibillot, et al., Opt. Commmun., 42, 101 (1982). 15. B. A. Auld, Acoust. Fields and Waves in Solids, Vol. 1 (A Wiley-Interscience Publication New York 1973) Chapter 7, and Chapter 8. 16. M. Biebl, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 30 330-334 (1992). 1283
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